A 1.55μm Fabry-Perot (F-P) thermo-optical t unable filter is fabricated.The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique.Due to the excellent thermo-optical property of a-Si,the refractive index of the F-P cavity will be changed by heating;the transmittance resonant peak will therefore shift substantially.The measured tuning rang is 12nm, FWHM (full-width-at-half-maximum) of the transmissi on peak is 9nm,and heating efficiency is 0.1K/mW.The large FWHM is mainly due to th e non-ideal coating deposition and mirror undulation.Possible improvements to increase the efficiency of heating are suggested.
A novel bonding method using silicate gel as bonding medium is developed.High reflective SiO 2/Si mirrors deposited on silicon substrates by e-beam deposition are bonded to the active layers at a low temperature of 350℃ without any special treatment on bonding surfaces.The reflectivities of the mirrors can be as high as 99 9%.A Si-based narrow band response InGaAs photodetector is successfully fabricated,with a quantum efficiency of 22 6% at the peak wavelength of 1 54μm,and a full width at half maximum of about 27nm.This method has a great potential for industry processes.
