With the rapid development of bioanalytical methods and biosensors,it is desirable to immobilize a Self-as-sembled Monolayers with pure protein on inorganic surface.In this work,we tried to immobilize myoglobin on a surface of a silicon substrate as a model.At first,the cleaned silicon substrate was filled with5%3-aminopropy-ltrimethoxysilane(3-APTS).Then the formed SAMs were treated with glutaraldehyde and solution of myoglobin.Subsequently,the composition,structure and morphology of the thin film surface have been characterized by X-ray photoelectron spectroscopy(XPS)and Atomic force microscopy(AFM).The results indicate that myoglobin had been successfully immobilized on P100Si substrate.This method will be especially useful for further protein biomolecule immobilization and advanced single molecule detection studies.