In machining the particle reinforced aluminum based composite material with high Si content using the cobalt-cemented tungsten carbide micro cutting tools, diamond like carbon （DLC） films are deposited on cobalt-cemented tungsten carbide micro-drills with two-step pretreatment method. Characteristics of DLC coated tools are investigated in bias-enhanced HFCVD system with the optimized hot filament arrangement. The optimization deposition technology is obtained and the wear mechanism of cutting tools is analyzed. The drilling performance of DLC coated tools is verified by the experiments of cutting particle reinforced aluminum based composite material （Si 15% in volume） compared with uncoated ones. Experimental results show that the two-step pretreatment method is appropriate for complex shaped cemented carbide substrates and ensures the good adhesive strength between the diamond film and the substrate. The cutting performance of DLC coated tool is enhanced 10 times when machining the Si particle reinforced aluminum based metal matrix composite compared with that of uncoated ones under the same cutting conditions.
