As-cast single crystal (SC) superalloy samples were shot peened and then annealed at different temperatures to investigate the effect of annealing temperature on the surface recrystallization behavior of the SC superalloy. The results show that the depth of recrystallized layers increases with the increase of annealing temperature. Below 1200 °C, the recrystallization depth climbs slowly with temperature rising. Above 1200 °C, the recrystallization depth increases sharply with the rise of temperature. The morphology of recrystallized grains is significantly affected by annealing temperature. Below the γ′ solvus, cellular recrystallization may be observed. Above the γ′ solvus, recrystallization occurs through the growth of well developed recrystallized grains. In addition, the microstructure evolution of recrystallized grains at the homogenization annealing temperature was studied. It is found that recrystallized grains first nucleate in the dendritic core areas on the shot-peened surface and then grow inwards along the dendritic core areas. With the dissolution of the coarse γ′ precipitates and γ/γ′ eutectics in the interdendritic areas, the recrystallized grain boundaries move through the interdendritic areas. Finally, the fully developed grains nearly have a uniform depth. The dissolution of primary γ′ precipitates is a critical factor influencing the recrystallization behavior of SC superalloys.