We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction.In the measurement of the scattered intensity profile at a certain angle of incidence,the perpendicular component of wave vector remains constant,which is realized by controlling the movement of the detector along a specified circular arc segment.We use the central S-peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w,the lateral correlation lengthξand roughness exponent a of the rough surface sample.The measurement copes strictly with the theoretical analysis,and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.
LI Hai-XiaLIU Chun-XiangCHEN Xiao-YiZHANG Mei-NaCHENG Chuan-Fu
