In order to improve femtosecond laser throughput,a parallel processing system consisting of liquid crystal on silicon(LCOS)device as spatial light modulator is put forward.A method is described for displaying Fourier hologram on LCOS,and a high uniformity of several diffraction peaks in the computer reconstruction is achieved.Application of this method to the parallel femtosecond laser processing is also demonstrated,and two intersecting rings and three tangent rings are fabricated respectively by one time in the photoresist.
