The equilibrium composition in strained quantum dot is the result of both elastic relaxation and chemical mixing effects,which have a direct relationship to the optical and electronic properties of the quantum-dot-based device.Using the method of moving asymptotes and finite element tools,an efficient technique has been developed to compute the composition profile by minimising the Gibbs free energy in self-assembled alloy quantum dot.In this paper,the composition of dome-shaped Ge_xSi_(1-x)/Si quantum dot is optimized,and the contribution of the different energy to equilibrium composition is discussed.The effect of composition on the critical size for shape transition of pyramid-shaped GeSi quantum dot is also studied.
