C^+ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon(DLC) film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nano-indentation, the DLC film has been recognized as hydrogenated DLC film and its tribological properties have been evaluated. The ball-on-disc testing results show that the hardness and the tribological properties of the DLC film produced by C^+ ion beam-assisted deposition are improved significantly. DLC film produced by C^+ ion beam-assisted deposition is positive to have a prosperous tribological application in the near future.
