基于高性能的微机电系统(MEMS)敏感结构芯片研制了一种新型带电作业电场测量预警系统,通过实时检测电场大小,当超出电场安全阈值发出预警信号,提醒作业人员采取相应的安全措施。基于相敏检测原理,设计了一种可抑制背景噪声的快速模拟解调电路,解决了数字信号处理精度低、响应慢等不足;基于ARM微控制器设计了信号采集和无线发射模块,并通过Lab VIEW虚拟仪器实现上位机显示;采用多探头三维布点方式,有效降低了人体晃动带来的干扰;10 k V输电线路模拟实验和ANSYS仿真表明:实验与仿真结果具有良好的一致性,系统具有较高测量精度,安全距离预警误差小于4.17 cm。
This paper presents a high performance electric field micro sensor with combined differential structure.The sensor consists of two backward laid micro-machined chips,each packaged by polymer and metal.The novel combined differential structure effectively reduces various environmental affections,such as thermal drift,humidity drift and electrostatic charge accumulation.The sensor is tested in near-ground place as well as balloon-borne sounding.In different weather conditions,the measurement results showed good agreement with those of the commercial electric field mill.
In this paper,the design and experimental results for a novel high-stability sounding electrostatic field micro sensor are presented.By means of hermetic chip sealing,digital weak signal demodulation unit,and probe sensor structure design,harsh environmental adaptation problems such as low temperature,high humidity,low air pressure,waterfall are solved.The sensor has a high resolution of 14 V/m,a wide measurement range of±100 kV/m,and is proved to have superior stability and performance in sounding electric field experiments than traditional sensors under different kinds of weather.
该文基于MEMS电场敏感芯片,研制出了一种新型的地面大气电场传感器,解决了现有场磨式电场仪易磨损、功耗大、故障率高等问题。敏感芯片采用SOIMUMPS加工工艺制备,其芯片面积仅为5.5 mm×5.5 mm。该文提出了传感器敏感芯片的弱信号检测方法,设计出了满足环境适应性的传感器整体结构方案,并建立了传感器的灵敏度分析模型。对电场传感器进行测试,测量范围为-50 k V/m^50 k V/m,总不确定度为0.67%,分辨力达到10 V/m,功耗仅为0.62 W。外场试验结果表明,MEMS地面大气电场传感器在晴天和雷暴天的电场探测结果,与Campbell公司场磨式电场仪探测结果都有较好的一致性,说明该传感器能满足预测雷暴要求,实现雷电监测和预警功能。
