To investigate a novel macro and micro driven linear piezoelectric motor composed of an ultrasonic motor with macro movement and a piezoelectric actuator with micro movement,a digital signal processing(DSP)based macro and micro power supply is designed,which fits the new linear piezoelectric motor.The power supply comprises a control circuit,a voltage conversion circuit,an amplifier circuit,a half-bridge module,an optical isolatorsdrive circuit,etc,where the DSP of TMS320F28335 is used as the controller.When the linear piezoelectric motor working in a macro driven state,the power supply outputs alternating currents with high frequency and high voltage,which drives the linear piezoelectric motor dynamically at an ultrasonic frequency;while working in the micro driven state,the power supply outputs direct currents with high voltage,which drives the linear piezoelectric motor in micro driven statically.Here a prototype of the macro-micro power supply is designed.After a series of experiments on the power supply with and without loads,the results show that the power supply can drive and control the macro micro driven linear piezoelectric motor,and realizes quick and seamless switch between macro and micro drive.In addition,the power supply can drive and control the ultrasonic motor or piezoelectric ceramic micro actuator individually.The power supply achieves the multiple parameters of output signals adjustable simultaneously and exhibits good control characteristics.
针对宏微超声电机驱动系统内部电路需求多路相互独立的高稳定精度电压,设计了逻辑链路控制(logical link control,简称LLC)变换器+开关型集成稳压两级结构的多路独立输出稳压电源。采用LLC变换器将220V交流电降压变换为多路输出,主功率用闭环控制实现高精度稳压输出,其他辅助输出用高效开关型MP1584降压稳压电路实现二次稳压输出。用设计的电源、宏微超声电机、宏微驱动器、光栅尺及激光测振仪构建了宏微超声电机驱动控制系统。试验结果证明,本电源解决了传统单级多路输出电源存在的交叉调整率问题,能提供±1%内的稳定电压,整机效率≥80%,且线路简单、体积小,工程设计上易于实现;优化了宏微超声电机驱动控制系统的体积,提高了效率和可靠性。
