In order to achieve a modulator with broad bandwidth and perfect impedance match,a novel electro-optical modulator based on GeO2-doped silica waveguides on silicon substrate is designed.The finite element model of the whole electro-optical modulator is established by means of ANSYS.With the finite element method analysis,the performance of the novel modulator is predicted.The simulation reveals that the designed modulator operates with a product of 3 dB optical bandwidth and modulating length of 226.59 GHz·cm,and a characteristic impedance of 51.6 Ω at 1 550 nm wavelength.Moreover,the calculated electrical reflected power of coplanar waveguide electrode is below-20 dB in the frequency ranging from 45 MHz to 65 GHz.Therefore,the designed modulator has wide modulation bandwidth and perfect impedance match.
