The fabrication technique of micro/nano-scale speckle patterns with focused ion beam (FIB) system is studied for digital image correlation (DIC) measurement under a scanning electron microscope (SEM).The speckle patterns are fabricated by directly etching the counterpart of the specimen to the black part of a template.Mean intensity gradient is used to evaluate the quality of these SEM images of speckle patterns fabricated based on different templates to select an optimum template.The pattern size depending on the displacement measurement sensitivity is adjusted by altering the magnification of FIB according to the relation curve of the etching size versus magnification.The influencing factors including etching time and ion beam current are discussed.Rigid body translation tests and rotation tests are carried out under SEM to verify the reliability of the fabricated speckle patterns.The calculated values are in good agreement with the imposed ones.
LI YanJieXIE HuiMinLUO QiangGU ChangZhiHU ZhenXingCHEN PengWanZHANG QingMing
In this paper,a new method combining focused ion beam(FIB)and scanning electron microscope(SEM)Moirétechnique for the measurement of residual stress at micro scale is proposed.The FIB is employed to introduce stress relief like the macro ring-core method and fabricate gratings with a frequency of 5000 lines/mm on the measured area of the sample surface.Three groups of gratings in different radial directions are manufactured in order to form a micro-scale strain rosette.After milling ring-core by FIB,the deformation incurred by relief of the stress will be recorded with the strain rosette.The displacement/strain field can be measured using SEM scanning Moiréwith random phase-shifting algorithm.In this study,the Nickel alloy GH4169 sample(which was processed by laser shock peening)is selected as a study object to determine its residual stress.The results showed that the components of the in-plane principal stresses were-359 MPa and-207 MPa,respectively,which show good agreement with the results obtained from the available literature.
