光刻仿真是SOC(System On Chip)光刻工艺的重要环节,为了实现仿真数据3D可视化,在光刻仿真程序SPLAT(Simulation of Projection Lens Aberrations via TCCs)基础上,提出了自动排序算法对SPLAT输出数据进行重新排列以便三维建模,建立了光照强度与深度转换模型,将光照强度数值转变为3D可视化的深度数据,论文最后设计了3D实时图形仿真程序并进行了实验。实验证明了自动排序算法以及转换模型的正确性和先进性,为超大规模SOC数据的3D交互式实时显示奠定了基础。
Automatic placement and routing technology provides an effective tool for designing simulation and information guidance.Various intelligent algorithms in mechanical design,ocean and ship engineering and aerospace design have been implemented.However,automatic placement and routing has never been integrated into interactive 3D application.In this paper,idea of combining the interactive 3D application with automatic placement and routing is proposed,and its main issue is discussed.Then we present a new placement and routing algorithm suitable for 3D interactive application containing model design,fundamental algorithm and global optimization to remove routing blockage.Experimental results demonstrate that the proposed algorithm works effectively in simulation,meets the requirements of real-time rendering and has great practical value.
