The local thermal conductivity of polycrystalline aluminum nitride （A1N） ceramics is measured and imaged by using a scanning thermal microscope （SThM） and complementary scanning electron microscope （SEM） based techniques at room temperature. The quantitative thermal conductivity for the A1N sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3w method. A thermal conductivity of 308 W/m-K within grains corresponding to that of high-purity single crystal A1N is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.
Zhang Yue-FeiWang LiR.HeiderhoffA.K.GeinzerWei BinJi YuanHan Xiao-DongL.J.BalkZhang Ze
