Conventional angle-tuned thin-film filters have serious angle sensitivity for their low spacer effective refractive index, and it is difficult to fabricate their angle control system. In this paper, we propose and fabricate a novel 100 GHz angletuned thin-film filter stack with low angle sensitivity, which uses the high refractive index material TiO2 as the spacer, and its incident angle can be expanded to 25°. Compared with the traditional Ta2O5-SiO2 thin-film filter stack, the novel stack has fewer layers. Using the polarization beam splitters and the half wave plates, the polarization sensitivity of the angle-tuned filter can also be suppressed. Simulation results and the experiments show that the thin-film filter with low angle sensitivity has an effective tuning range of 33 nm, which can cover the whole C-band, and its angle control system is easy to be fabricated.
Multilayer dielectric thin film edge filter has serious polarization sensitivity under oblique incidence. The cutoff-bands of the s-polarization and p-polarization light in conventional edge filter will separate obviously under 45° oblique incidence, which limits its application. Based on the two chosen materials TiO2 and SiO2, a novel stack structure is proposed to design the non-polarization short-wave-pass thin film edge filter. By using the(4H 4L 4H) as the matching layers, the polarization separation at 3 dB transmittance for the thin film edge filter cutoff-band is less than 1 nm at the incident angle of 45°. In this way, the non-polarization short-wave-pass edge filter is easily designed and fabricated.
