To study the mechanical properties of the film/substrate structure, the finite element code ABAQUS v6.9-1 is adopted to simulate the tensile mechanical behavior of the nanoscale thin film bonded to a substrate. The bifurcation phenomenon of the structure under uniaxial tension is found： the single-neck deformation, the multiple-neck deforma- tion and the uniform deformation. The substrate and the film are regarded as power-hardening materials obeying the J2 deformation theory. Firstly, the influence of material hardening match on tensile bifurcation mode is analyzed under perfectly well-bonded interface condition. Then, the effects of interfacial stiffness and other superficial defects sur- rounding the imperfection on bifurcation mode are investigated. It is concluded that under the well-bonded interface condition, if the stress of the substrate is larger than the film, the film will uniformly deform with the substrate; if the stress of the substrate is smaller than the film, the film will form a single neck, except the case that a weakly-hardening film is bonded to a steeply-hardening substrate when multiple necks can be formed. With the decrease of interracial stiffness, the uniform deformation mode can transform into the multiple-neck deformation mode, and further transform into the single-neck deformation mode. And other defects surrounding the imperfection can influence the wavelength of deformation and neck number.
As instrument technology is needed for rapid determination of the smaller,thinner and lighter specimens,more stringent demands are related to thin films such as micro-electro-mechanical systems(MEMS),dielectric coatings and electronic packaging.Therefore,the requirement for testing platforms for rapidly determine the mechanical properties of thin films is increasing.Buckling of a film/substrate system could offer a variety of applications,ranging from stretchable electronics to micro-nanoscale metrology.In this paper,a fatigue-loading device has been designed to make the cyclic loading available for investigating the cumulative propagation of thin film buckling.The straight side buckling of thin compressed titanium film with the thickness of 50 nm deposited on organic glass substrates is investigated by using an optical microscope.The cumulative buckling propagation under the cyclic loading of a sequence of peak compression with the frequency 1 Hz is recorded by CCD camera.The buckling extension lengths are calculated by digital image measurement technology.
WANG ShiBinJIA HaiKunLI LinAnSUN HengCUI DiQiangGUO ZhenShanXUE XiuLi
