The CoCr/Pt bilayers and (CoCr/Pt)20 multilayers with Pt underlayer were prepared by DC magnetron sputtering. The effects of prepared condition on perpendicular magnetic anisotropy were investigated. The results show that the thickness of Pt underlayer has a great effect on the microstructure and perpendicular magnetic anisotropy of CoCr/Pt bilayers and (CoCr/Pt)20 multilayers.When the thickness of Pt underlayer increases, Pt(111) and CoCr(002) peaks of both CoCr/Pt bilayers and (CoCr/Pt)20 multilayers increase and the bilayer periodicity of the multilayers is improved. The effective magnetic anisotropy of (CoCr/Pt)20 multilayers with Pt underlayer was much larger than that of CoCr/Pt bilayers. The (CoCr/Pt)20 multilayers has a stronger perpendicular magnetic anisotropy than that of CoCr/Pt bilayers. This is ascribed to the interface magnetic anisotropy of the multilayers.
