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国家重点基础研究发展计划(2009CB724200)

作品数:14 被引量:23H指数:2
相关作者:杜诗文秦海辰尹周平毛军红蒋立文更多>>
相关机构:华中科技大学西安交通大学太原科技大学更多>>
发文基金:国家重点基础研究发展计划国家自然科学基金国家重点实验室开放基金更多>>
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14 条 记 录,以下是 1-10
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粘结固体润滑涂层磨损过程的在线铁谱监测被引量:2
2013年
针对制备的粘结固体润滑涂层,采用在线图像可视铁谱仪监测其在磨损机上的磨损过程,以寻求一种高效的监测磨损规律的方法.结果表明,适当增大载荷以及减少涂层中环氧树脂的含量,能够缩短整个磨损过程所用时间,从而使得在实验室条件下,能够快速研究摩擦配副材料的磨损规律,以及在磨损状态转变处的特点.
董光能王春辉姚智刚张华毛军红
关键词:在线铁谱仪
芦荟内植钛合金表面的晶须生长研究
2010年
采用生物技术进行材料表面处理是极其重要和具有诱人应用前景的方法。芦荟作为常见的草本植物,富含多种活性成分。采用OM和SEM等手段主要研究在芦荟体内植入钛合金(TC4)并在TC4表面生成草酸钙晶须这一过程。合适的植入处理时间与一定的表面粗糙度对晶须的生成数量和长度起着决定作用。通过EDS分析晶须的化学成分可得到晶须的化学式为Ca(1-x)C2O4,其中x的取值范围为0.4到0.5。在扫描电镜(SEM)下观察到晶须的长度为40~100μm,直径为2.17~5.31μm。
秦立果董光能李健杨华斌
关键词:钛合金芦荟生物处理晶须
Molecular dynamics simulations of atomic-scale friction in diamond-silver sliding system被引量:5
2009年
Molecular dynamics simulations have been performed to explore the atomic-scale sliding friction, especially the stick-slip friction, in a system consisting of a diamond slider and a silver substrate. The mechanisms of the stick-slip behavior are investigated by considering sliding speeds between 10 m/s and 200 m/s.The analyses of the shear distance between the upmost layer and the downmost layer and displacements of a column of atoms in the slider show that shearing deformation of the slider is the main cause of the stick-slip phenomenon. Our simulations also present that a commensurate fit between the two contact surfaces is unimportant for the stick-slip friction.
ZHU PengZhe HU YuanZhong WANG Hui
关键词:银色剪切变形剪切位移
Some advances on investigating friction characteristics of rolling guide ways被引量:1
2013年
A review of research on hyste-resis and stick-slip is presented in this paper. Devices for investigating friction hysteresis and stick-slip of linear rolling guide ways are introduced,as well as some experiment results and conclusions,and some factors impacting on stick-slip are also exhibited.
Zhang WeiZhou YuanMao Junhong
关键词:HYSTERESIS
气浮支承精密运动平台的俯仰振动分析被引量:1
2012年
参考有限元分析结果,建立了精密运动平台结构的多刚体离散元模型,依据模态实验结果进行模型验证和修正,利用所建模型分析直线非质心驱动,以及气浮支承作用点漂移对运动平台俯仰振动的影响,提出改进措施,为后续设计提供指导。
吴志会张鸣姜伟金建新
纯电力加载下压电陶瓷内环迟滞特性的实验研究被引量:2
2014年
以典型压电陶瓷堆叠执行器为研究对象,对纯电力加载作用下压电陶瓷的内环迟滞行为进行了实验研究和分析。实验采用Sawyer-Tower方法获得了执行器的极化强度,利用高精度电容式位移传感器测量了执行器的输出位移,结合外围实验设备,通过计算得到了堆叠执行器在输入电压频繁折返过程中的电压-极化和电压-应变曲线。从压电陶瓷内部晶体的电畴转向角度出发,对其行为特性的产生机理进行了分析,给出了压电陶瓷堆叠执行器的建议工作区域。
秦海辰尹周平
关键词:压电陶瓷执行器
热处理温度和溅射气压对铜薄膜结构和性能影响的研究被引量:2
2012年
采用射频磁控溅射镀膜法,在不同溅射气压、不同热处理温度下制备了铜薄膜,并利用扫描电镜(SEM)和X射线衍射(XRD)研究了溅射气压和热处理温度对铜薄膜结构和性能的影响。结果表明:热处理前铜薄膜的晶粒尺寸较小且大小分布不均;随着热处理温度的提高,薄膜的晶粒尺寸逐渐增大,表面更加平坦化,而晶粒之间的缝隙呈现先增大再减小后增大的趋势,在400℃时晶粒排列最紧密,表面最平坦;随着溅射气压的增高,铜(111)峰值呈现先增大后减小的趋势,当溅射气压为1.0Pa时铜的抗电迁移性最强。
蒋立文宋建丽李永堂杜诗文郑光锋
关键词:铜薄膜磁控溅射扫描电镜X射线衍射
集成电路中Ta扩散阻挡层对铜布线电迁移性能的影响
2013年
采用磁控溅射法在硅基材料上分别制备了Cu薄膜和Cu/Ta薄膜,用X射线衍射仪(XRD)研究两种样品在不同温度热处理下的织构情况和择优取向。结果表明,加Ta薄膜的样品可显著提高Cu(111)的衍射峰强度,说明Ta薄膜层能有效增强Cu薄膜层的抗电迁移性能。加Ta层的样品在一定温度下退火后同样也能增进Cu薄膜的抗电迁移性能。
郑光锋付建华李永堂杜诗文蒋立文
关键词:磁控溅射X射线衍射
Fractal Characteristics and Microstructure Evolution of Magnetron Sputtering Cu Thin Films被引量:1
2013年
How to describe surface morphology characteristic and microstructure evolution are the hottest researches of current thin film researches. But in traditional characterization of surface morphology, the roughness parameters are scale related. And the microstructure evolution of thin film during post-treatment is usually not considered in detail, To give a better understanding of the roughness of thin films topography, fractal method is carried out. In addition, microstrueture evolution of thin films is analyzed based on the crystallography and energy theory. Cu thin films are deposited on Si (100) substrates by magnetron sputtering, and then annealed at different temperatures. Surface topography is characterized by atomic force microscope (AFM). Triangular prism surface area (TPSA) algorithm is used to calculate the fractal dimension of the AFM images. Apparent scale effect exists between the surface morphology roughness and film thickness. Relationship between the fractal dimension and roughness is analyzed by linear regression method and linear relationship exists between fractal dimension and surface roughness root mean square (RMS). Fractal dimension can be characterized as a scale independence parameter to represent the complex degree and roughness level of surface. With the increase of annealing temperature, surface roughness and fractal dimension decrease. But when the annealing temperature exceeds the recrystallization temperature, due to the agglomeration and coalescence of Cu grain, surface roughness and fractal dimension increase. Scale effect and changing regularity of grain growth and shape evolution for different film thickness under different annealing temperatures are analyzed. Based on minimum total free energy, regularity of grain growth and changing is proposed. The proposed research has some theory significance and applicative value of Cu interconnect process and development of MEMS.
DU ShiwenLI Yongtang
Numerical study of contacts between a flat-ended punch and a half-space embedded with inhomogeneities被引量:2
2014年
This paper presented a numerical approach to solving the problem of a flat-ended punch in contact with a half-space matrix embedded with multiple three dimensional arbitrary-shaped inhomogeneities.Based on the semi-analytical method(SAM)and the equivalent inclusion method,numerical procedures were developed and the effects of inclusion shape and distribution were analyzed.Fast Fourier transform technique was implemented to accelerate the calculation of surface deformation and subsurface stress.Interactions of inter-inclusions and inclusion-matrix were taken into account.Numerical results showed the presence of inhomogeneities(i.e.,microstructures in solids)indeed had a great effect on local contact pressure and a strong disturbance to the subsurface stress field in the vicinity of inclusions.The effects were dependent on the shape and distribution of inclusions and inter-inclusion interactions.The physical significance of this study is to provide an insight into the relation between the material microstructure and its response to the external load,and the solution approach and procedures may find useful applications,for example,the analysis of fatigue and crack propagation for composite materials,prediction of stress field in solids containing material defects,and study of the mechanism of chemical-mechanical polish(CMP)for inhomogeneous materials,etc.
WANG LeiWANG WenZhongWANG ZhanJiangWANG HuiMA TianBaoHU YuanZhong
关键词:INHOMOGENEITY
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