We analyzed perpendicularly configured dual-frequency(DF) capacitively coupled plasmas(CCP).In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency(RF) sources.Particle-in-cell/Monte Carlo(PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly.
A one-dimensional hybrid model was developed to study the electrical asymmetry effect(EAE) caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions(IEDs) were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters.
An implicit electrostatic particle-in-cell/Monte Carlo(PIC/MC) algorithm is developed for the magnetized discharging device simulation.The inductive driving force can be considered.The direct implicit PIC algorithm(DIPIC) and energy conservation scheme are applied together and the grid heating can be eliminated in most cases.A tensor-susceptibility Poisson equation is constructed.Its discrete form is made up by a hybrid scheme in one-dimensional(1D) and twodimensional(2D) cylindrical systems.A semi-coarsening multigrid method is used to solve the discrete system.The algorithm is applied to simulate the cylindrical magnetized target fusion(MTF) pre-ionization process and get qualitatively correct results.The potential application of the algorithm is discussed briefly.
