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国家自然科学基金(10976030)

作品数:4 被引量:7H指数:2
相关作者:李静平方明贺洪波邵建达范正修更多>>
相关机构:中国科学院上海光学精密机械研究所中国科学院研究生院中国科学院大学更多>>
发文基金:国家自然科学基金更多>>
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多晶氧化物薄膜及复合膜系应力模型被引量:3
2012年
基于膜层结构的弛豫现象,建立了一个多晶膜的应力演化模型,并通过线性组合给出了复合膜的生长应力模型。利用双光束基底曲率测量装置实时测量了电子束蒸发氧化铪、氧化硅多晶膜及其复合膜的应力演化过程,并对测量结果进行了拟合分析。
李静平方明贺洪波邵建达范正修李朝阳
关键词:复合膜
Design of wideband graded-index antireflection coatings at oblique light incidence被引量:1
2012年
We suggest a design method of graded-refractive-index (GRIN) antireflection (AR) coating for s-polarized or p- polarized light at off-normal incidence. The spectrum characteristic of the designed antireflection coating with a quintic effective refractive-index profile for a given state of polarization has been discussed. In addition, the genetic algorithm was used to optimize the refractive index profile of the GRIN antireflection for reducing the mean reflectance of s- and p-polarizations. The average reflectance loss was reduced to only 0.04% by applying optimized GRIN AR coatings onto BK7 glass over the wavelength range from 400 to 800 nm at the incident angle of θo = 70°.
Zhang Jun-ChaoFang MingJin Yun-XiaHe Hong-Bo
磁控溅射硅基薄膜应力演化实时研究被引量:2
2013年
采用多光束应力实时测量装置监控并分析了磁控溅射Si和SiNx薄膜的总力及应力演化过程。在两种膜层中均观察到了应力释放及恢复现象。Si膜中应力是可逆的,而SiNx膜中应力是部分可逆的。物理吸附和解吸附分别是应力释放和恢复的主要原因。不可逆的应力分量来源于化学吸附,基于吸附机制建立了一个应力释放模型。
李静平方明贺洪波邵建达李朝阳
关键词:应力释放物理吸附化学吸附
Rugate filters prepared by rapidly alternating deposition被引量:1
2011年
A methodology for the fabrication of composite (Nb205)l-x(SiO2)~ thin-film rugate filters by using pulsed direct current magnetron sputtering is presented. The two materials are mixed using rapidly alternating deposition technol- ogy. The optical properties of the composite films varying with the composition of the material are studied in detail, Refractive indices between 1.50 and 2.14 can be realized in our coating system. Two designed rugate filters with a re- flection band at the wavelength of 532 nm are fabricated using an automatic deposition process. The microstructure of the rugate filter is investigated by using scanning electron microscopy. The calculated and the measured transmittance spectra axe in good agreement with each other, The causes of the slight differences between them are also analysed.
张俊超方明邵宇川晋云霞贺洪波
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